Abstrak
STUDI PENUMBUHAN LAPISAN TIPIS COPPER PHTHALOCYANINE PADA INDIUM TIN OXIDE MENGGUNAKAN METODE EVAPORASI DENGAN VARIASI ARUS
Oleh :
BUDHI ARSITA KURNIAWATI - M0201001 -
There has been result CuPc thin film grown on ITO substrate using
evaporation method. CuPc thin film has been grown with current deposition 35 A,
40 A and 45 A. Characteristic of CuPc thin film using Scanning Electron
Microscopy to determined the morphology structure, composition and thickness.
X-Ray diffractometer used to estimate crystallizations structure of CuPc thin film.
The resistance of thin film determined using I-V method. CuPC thin film has
morphology structure which more grains of CuPc that has been deposited, the
more contoured the structure that makes it dark, the composition of CuPc are
Carbon (C), Nitrogen (N), Oxygen (O) and Copper (Cu). CuPc thin film thickness
result range 0.37 m m to 0.69 m m . X-Ray diffraction model of CuPc thin film
occur in angel 2q 6.9
o
, 24.1
o
, 26.8 o
and 28.4 o
. the resistance value depend with
the current deposition. The more bigger the current deposition makes the
resistance is bigger too.
Key word : CuPc thin film, evaporation, current deposition.