KAJIAN PENGUKURAN KETEBALAN LAPISAN TIPIS BERBASIS INTERFEROMETRIK

Oleh :
DODI RASANJANI - M0205021 -

ABSTRACT One of the most important properties to known is the thickness of the film. The result of research reported the method and construction of an optical system which uses based an interferometer Michelson, which allows can applied to determine the thickness of thin film after grown up on a glass and alumunium substrates. A measure technique based on the comparison of two patterns interference which produced by a Laser with wavelength 632.8 nm . Comparison between two patterns of interference which generated by substrate without and with film is taken into a count for the measuring thickness of thin film. This Method that has been conducted can measure film thickness in range of (90-218) nm. Keywords: Interference, optical path difference, Change of phase, Interference in Thin Films.