KAJIAN PENGUKURAN KETEBALAN LAPISAN TIPIS BERBASIS INTERFEROMETRIK
Penulis Utama
:
DODI RASANJANI
NIM / NIP
:
M0205021
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ABSTRACT
One of the most important properties to known is the thickness of the film. The
result of research reported the method and construction of an optical system
which uses based an interferometer Michelson, which allows can applied to
determine the thickness of thin film after grown up on a glass and alumunium
substrates. A measure technique based on the comparison of two patterns
interference which produced by a Laser with wavelength 632.8 nm .
Comparison between two patterns of interference which generated by substrate
without and with film is taken into a count for the measuring thickness of thin
film. This Method that has been conducted can measure film thickness in range
of (90-218) nm.
Keywords: Interference, optical path difference, Change of phase, Interference in
Thin Films.
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Penulis Utama
:
DODI RASANJANI
Penulis Tambahan
:
-
NIM / NIP
:
M0205021
Tahun
:
2009
Judul
:
KAJIAN PENGUKURAN KETEBALAN LAPISAN TIPIS BERBASIS INTERFEROMETRIK
Edisi
:
Imprint
:
SURAKARTA - FMIPA - 2009
Program Studi
:
S-1 Fisika
Kolasi
:
Sumber
:
Kata Kunci
:
Jenis Dokumen
:
Skripsi
ISSN
:
ISBN
:
Link DOI / Jurnal
:
-
Status
:
Public
Pembimbing
:
1. Ahmad Marzuki, S.Si., Ph.D. 2. Dra. Riyatun, M.Si.
Penguji
:
Catatan Umum
:
Fakultas
:
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File
:
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